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{Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing}

2015

Article

mms


Author(s): Keskinbora, K. and Grévent, C. and Hirscher, M. and Weigand, M. and Schütz, G.
Journal: {Advanced Optical Materials}
Volume: 3
Pages: 792--800
Year: 2015
Publisher: WILEY-VCH Verlag GmbH Co. KGaA

Department(s): Modern Magnetic Systems
Bibtex Type: Article (article)

Address: Weinheim
DOI: 10.1002/adom.201400411
Language: eng

BibTex

@article{escidoc:0146,
  title = {{Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing}},
  author = {Keskinbora, K. and Gr\'event, C. and Hirscher, M. and Weigand, M. and Sch\"utz, G.},
  journal = {{Advanced Optical Materials}},
  volume = {3},
  pages = {792--800},
  publisher = {WILEY-VCH Verlag GmbH Co. KGaA},
  address = {Weinheim},
  year = {2015}
}