@article{escidoc:0314, title = {{Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures}}, author = {Mayer, M. and Gr\'event, C. and Szeghalmi, A. and Knez, M. and Weigand, M. and Rehbein, S. and Schneider, G. and Baretzky, B. and Sch\"utz, G.}, journal = {{Ultramicroscopy}}, volume = {111}, pages = {1706--1711}, year = {2011}, doi = {10.1016/j.ultramic.2011.09.003} }